Laser direct writing and characterizations of flexible piezoresistive sensors with microstructures
具有微结构的柔性压阻传感器的激光直写和表征
微細構造を備えた柔軟なピエゾ抵抗センサーのレーザー直接書き込みと特性評価
미세 구조가 있는 유연한 압저항 센서의 레이저 직접 쓰기 및 특성화
Escritura directa con láser y caracterizaciones de sensores piezorresistivos flexibles con microestructuras
Ecriture directe laser et caractérisations de capteurs piézorésistifs flexibles à microstructures
Прямая лазерная запись и характеристика гибких пьезорезистивных датчиков с микроструктурами
Chenying Zhang 张陈应 ¹, Wei Zhou 周伟 ¹, Da Geng 耿达 ¹, Cheng Bai 白成 ¹, Weida Li ¹ ², Songyue Chen 陈松月 ¹, Tao Luo 罗涛 ¹, Lifeng Qin 秦利锋 ¹, Yu Xie 谢瑜 ¹
¹ Department of Mechanical & Electrical Engineering, Xiamen University, Xiamen 361101, China
中国 厦门 厦门大学机电工程系
² College of Information Science and Engineering, Northeastern University, Shenyang 110004, China
中国 沈阳 东北大学信息科学与工程学院
Functional materials with high viscosity and solid materials have received more and more attentions in flexible pressure sensors, which are inadequate in the most used molding method. Herein, laser direct writing (LDW) method is proposed to fabricate flexible piezoresistive sensors with microstructures on PDMS/ MWCNTs composites with an 8% MWCNTs mass fraction.
By controlling laser energy, microstructures with different geometries can be obtained, which significantly impacts the performances of the sensors. Subsequently, curved microcones with excellent performance are fabricated under parameters of f = 40 kHz and v = 150 mm·s-1.
The sensor exhibits continuous multi-linear sensitivity, ultrahigh original sensitivity of 21.80 % kPa-1, wide detection range of over 20 kPa, response/recovery time of ~100 ms and good cycle stability for more than 1000 times. Besides, obvious resistance variation can be observed when tiny pressure (a peanut of 30 Pa) is applied. Finally, the flexible piezoresistive sensor can be applied for LED brightness controlling, pulse detection and voice recognition.
